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A low K dielectric composite layer is formed of a low k barrier layer and a low K dielectric layer on the barrier layer. The barrier layer, which is deposited with the result of having a hydrophobic top surface, is treated with an oxygen plasma to convert the surface from hydrophobic to hydrophilic. A subsequent water-based clean is very effective in removing yield-reducing defects on the barrier layer due to the conversion of the surface of the barrier layer. After the water-based clean, the low K dielectric layer is formed on the surface of the barrier layer to achieve the composite layer that has a low K.
In the manufacturing of semiconductors, one of the developments has been the use of low k dielectrics-for an interlayer dielectric (ILD), the layer between conducting layers above the semiconductor substrate. This low K dielectric is to reduce capacitive coupling between conductors that are used as interconnect. Reducing this capacitive coupling is particularly important in cases where speed is a high priority, which is often the case. The low K materials are typically neither the best insulators nor the easiest to manufacture with high yield. Often barrier layers and capping layers are required in order to achieve all of the characteristics necessary for successful operation. These additional layers add steps, which complicate the process and potentially introduce yield problems.